Six-degrees-of-freedom parallel mechanism for micro-positioning work

摘要

A six-degrees-of-freedom parallel mechanism for micro-positioning work is disclosed. This mechanism freely performs a desired motion of translation and rotation of a moving platform using internal and external links actuated by linear actuators capable of precisely controlling the link positions, thus being effectively used as a 6d of parallel mechanism required to carry out a variety of micro-positioning works within a limited workspace. In the mechanism of this invention, a moving platform 10 is placed at an upper position, with a multiaxial spherical joint 40 mounted to the central portion of the moving platform 10. A base platform 20 is placed at a lower position of the mechanism. Three external links 30 couple the moving platform 10 to the base platform 20, while three internal links 50 couple the multiaxial spherical joint 40 to the base platform 20. In this mechanism, the internal links 50 are commonly coupled to the multiaxial spherical joint 40 so as to form a tetrahedral structure. In addition, each of the internal and external links 50 and 30 is a linear actuator designed to be precisely controllable in its position.