METHOD FOR PRODUCING METAL OXIDE FILM, METAL OXIDE FILM, ELEMENT USING THE METAL OXIDE FILM, SUBSTRATE WITH METAL OXIDE FILM, AND DEVICE USING THE SUBSTRATE WITH METAL OXIDE FILM

摘要

Disclosed are: a metal oxide film, which is formed by a coating method that is one of the methods for producing a metal oxide film, and which has a good balance between excellent transparency and high electrical conductivity, while having excellent film strength; and a method for producing the metal oxide film. Specifically disclosed is a method for producing a metal oxide film, which comprises: a coating step wherein a coating film is formed on a substrate using a metal oxide film-forming coating liquid that contains various organic metal compounds; a drying step wherein the coating film is changed into a dry coating film; and a heating step wherein an inorganic film is formed from the dry coating film. The method for producing a metal oxide film is characterized in that in the heating step, the dry coating film, which is mainly composed of the various organic metal compounds, is heated to a temperature at which at least mineralization of organic metal compound components occurs or higher in an oxygen-containing atmosphere at a temperature not higher than the temperature that is lower by 10˚C than the dew point, so that the organic components in the dry coating film are removed by thermal decomposition or combustion, or by thermal decomposition and combustion, thereby forming a metal oxide fine particle layer which is densely filled with metal oxide fine particles that are mainly composed of various metal oxides.