SEALED MECHANISM FOR TRANSMITTING MOVEMENTS FOR A CONFINED CHAMBER, AND SYSTEM FOR THE VACUUM-DEPOSITION OF A MATERIAL ON A SUBSTRATE

摘要

The invention relates to a sealed transmission mechanism (13) for transmitting at least two rotary movements through a confined chamber (1) having an opening (8). The mechanism includes a sealed housing (32) defining an inner space (31) and comprising a coupling (14) adapted to sealingly connect said inner space to the opening (8) of the chamber; first and second shafts (20, 24) extending from the inner space of the housing and passing through said coupling (14), and capable of transmitting a torque, wherein the first shaft is flexible; first and second transmission mechanisms (18, 19) suitable for rotating the first and second shafts, respectively, from outside the housing.