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Resin molded product production process, metal structure production process, and resin molded product

机译:树脂成型品的制造工序,金属结构物的制造工序以及树脂成型品

摘要

A resin molded product production process has a resist pattern formation step including formation of the first resist layer on s substrate, positioning of the substrate and a mask A, exposure of the first resist layer using the mask A, heat-treatment of the first resist layer, formation of the second resist layer on the first resist layer, positioning of the substrate and a mask B, exposure of the second resist layer using the mask B, heat-treatment of the second resist layer, and development of the resist layers, thereby creating a given resist pattern. The production process further has a metal structure formation step of depositing a metal on the substrate in accordance with the resist pattern by plating, and a molded product formation step of forming a resin molded product by using the metal structure as a mold. A resin molded product is thereby produced.
机译:树脂模制品的生产工艺具有抗蚀剂图案形成步骤,该步骤包括在基板上形成第一抗蚀剂层,基板和掩模A的定位,使用掩模A对第一抗蚀剂层进行曝光,对第一抗蚀剂进行热处理。层,第二抗蚀剂层在第一抗蚀剂层上的形成,基板和掩模B的位置,使用掩模B对第二抗蚀剂层的曝光,第二抗蚀剂层的热处理以及抗蚀剂层的显影,从而产生给定的抗蚀剂图案。该生产方法还包括金属结构形成步骤,该金属结构形成步骤通过电镀根据抗蚀剂图案在基板上沉积金属,以及模制产品形成步骤,该模制产品形成步骤通过使用该金属结构作为模具来形成树脂模制产品。由此生产树脂模制产品。

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