THERMALLY STABLE MULTILAYER MIRROR FOR THE EUV SPECTRAL REGION

摘要

The invention relates to a multilayer mirror (1) for reflecting EUV radiation, which contains a number of alternating molybdenum layers (4) and silicon layers (3). According to the invention, a barrier layer (5) is placed on a number of boundary surfaces between the molybdenum layers (4) and the silicon layers (3) and contains a silicon nitride or a silicon boride. A high thermal stability, particularly a high long-time stability at temperatures of greater than 3,000 °C with a simultaneously high degree of reflection of the multilayer mirror is achieved by the barrier layers (5) made of a silicon nitride or a silicon boride. A multilayer mirror (1) of the aforementioned type can be used, in particular, as a heatable collector mirror of an EUV radiation source.