THERMALLY STABLE MULTILAYER MIRROR FOR THE EUV SPECTRAL REGION

摘要

the invention that a plurality of alternately arranged molybdenum layer 4 and the silicon layer (3) comprises which relates to a multi- layer mirror 1 for reflecting the EUV light . The molybdenum layers (4) and silicon layers (3) a barrier layer (5) containing silicon nitride or silicon boride over a plurality of the interface between is disposed , according to the present invention . Silicon nitride , or high heat resistance by the barrier layers (5) made of silicon boride , the high reflectivity of the multilayer mirror is at the same time , especially for a long time to achieve high temperature stability at 300 or more is obtained . This type of multi- layer mirror 1 may in particular be used as heatable condenser mirror of the EUV radiation source .