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Actuatable capacitive transducer for quantitative nanoindentation combined with transmission electron microscopy
Actuatable capacitive transducer for quantitative nanoindentation combined with transmission electron microscopy
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机译:用于定量纳米压痕的可致动电容式传感器与透射电子显微镜相结合
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摘要
An actuatable capacitive transducer including a transducer body, a first capacitor including a displaceable electrode and electrically configured as an electrostatic actuator, and a second capacitor including a displaceable electrode and electrically configured as a capacitive displacement sensor, wherein the second capacitor comprises a multi-plate capacitor. The actuatable capacitive transducer further includes a coupling shaft configured to mechanically couple the displaceable electrode of the first capacitor to the displaceable electrode of the second capacitor to form a displaceable electrode unit which is displaceable relative to the transducer body, and an electrically-conductive indenter mechanically coupled to the coupling shaft so as to be displaceable in unison with the displaceable electrode unit.
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