METHOD AND SYSTEM FOR THICKNESS MEASUREMENT OF LARGE-AREA GLASS SUBSTRATES

摘要

In order to facilitate robust and accurate inline measurement of thickness profiles of transparent substrates, a system for the thickness measurement of transparent flat substrates is provided, comprising at least two measuring heads and a traversing device with two traversing units to which the measuring heads are attached and which are movable, independent of one another, over the substrate at an angle to a feed direction of the glass sheet. Said system also comprises a control device which controls the movement of the traversing units in such a way that, in operation, the traversing units are moved from edge to edge, offset in phase and at an angle to the feeding direction of the substrate, and also an analysis device which determines thickness profiles, with the aid of the data from the measuring heads.