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METHOD FOR ELIMINATING ROW OR COLUMN ROUTING ON ARRAY PERIPHERY
METHOD FOR ELIMINATING ROW OR COLUMN ROUTING ON ARRAY PERIPHERY
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机译:消除阵列外围行或列路由的方法
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摘要
The present disclosure provides systems, methods, and apparatus to facilitate edge routing among a plurality of microelectromechanical devices arranged in a mosaic or array. In one aspect, the disclosed implementations modify the construction of a movable layer, such that portions of the movable layer, in addition to serving their original functions, also facilitate routing from a single edge of the device. In some implementations, portions of the movable layer are re-oriented to achieve edge routing, while in others, the orientation remains the same but electrical connections are altered.
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