ANNULAR-ARRAY TYPE BEAM-POSITION MONITOR WITH SUB-MICRON RESOLUTION AND A PARAMETRIC METHOD FOR OPTIMIZING PHOTO DETECTORS

摘要

The present invention relates to the design and manufacture of devices for aligning beamline components and/or for real-time monitoring of an x-ray beam and/or a series of the beamline optical elements. More particularly, the present invention relates a novel annular-array type beam position monitor, an analytical method for designing and optimizing the beam position monitor in three dimensions, and a novel direct method for finding a beam centroid that enable sub-micron beam position sensitivity, high precision alignment and noise-free operation of the system.