PLASMA GENERATION DEVICE WITH ELECTRON CYCLOTRON RESONANCE

摘要

A plasma-generation device with electron cyclotron resonance, includes two adjacent sealed vacuum chambers configured to contain plasmas, an injector configured to inject a high-frequency wave into the chambers, a magnetic structure to generate a magnetic field in the chambers including a plurality of parallelepipedal permanent magnets and generating at least two plasmas according to the magnetic field lines, the module of the magnetic field having a magnetic mirror configuration with at least one electron cyclotron resonance area per plasma, the magnetic structure including at least one permanent magnet contributing to the formation of a plasma in each one of the chambers, such that the chambers share the same at least one permanent magnet on the common wall thereof.