DEVICE FOR PLASMA GENERATION FROM THE GAS MEDIA BY ELECTRON-CYCLOTRON RESONANCE (ECR) WITH A HIGH RANGE ALONG ONE AXIS

摘要

1. A device for generating plasma by electron-cyclotron resonance ECR from a gaseous medium, having a significant length along the axis and containing at least two coaxial waveguides (4), each of which is formed of a central conductor (1) and an external conductor (2) for directions of microwave waves into the processing chamber, characterized in that at least two electromagnetic waveguides (4) are connected to a magnetic circuit (21-22), elongated in one direction, while the specified magnetic circuit is surrounded AET waveguides (4) creating a magnetic field that can reach a state near said volnovodov.2 ECR. The device according to claim 1, characterized in that the magnetic circuit contains two poles (21-22) with opposite polarity (31-32), located near the waveguides, to form a magnetic trap for electrons. The device according to claim 2, characterized in that the first pole (21) forms a first line surrounding one or more waveguides (4), while the second pole (22) forms a second line surrounding the first line (21) .4. The device according to claim 1, characterized in that the central conductor (1) of each waveguide contains elements capable of protecting the hole of the specified waveguide and acting as antennas. The device according to claim 4, characterized in that the central conductor (1) contains a concentric disk (5) of a larger diameter than the opening of the waveguide (4) to protect the inside of the specified waveguide, located as close to the ECR region as possible and containing a rod at the top (6 ) located coaxially with the central conductor (1) .6. The device according to claim 4, characterized in that at the end of the central conductor there is a plate (7), elongated along a larger