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CUSP ELECTROMAGNETIC FIELD DEVICE OF LARGE-DIAMETER SINGLE-CRYSTAL FURNACE

机译:大直径单晶炉尖头电磁场装置

摘要

Disclosed is a cusp electromagnetic field device of a large-diameter single-crystal furnace. The device comprises direct current coils (2, 6) for generating a cusp electromagnetic field and at least two annular closed vessels filled with cooling oil. The two annular closed vessels are superposed up and down to form a hollow cylindrical shape. Each closed vessel is formed by welding half-enclosed shields (1, 7) located outside the vessel and an inner cylinder (12) and two baffle plates (11) located inside the vessel to each other. A pipeline, an oil pump, and an oil cooler (13) together form a forcible oil cooling system. A group of direct current coils (2, 6) formed through winding of solid copper pipes are disposed in each closed vessel. Since an upper coil and a lower coil are arranged in parallel, generated magnetic force lines are distributed in an axial symmetry manner, the magnetic field strength is continuously adjustable, axial and radial evenness of a crystal bar is ensured, and the effect of controlling the oxygen content of a single crystal is desirable. In usage, the dichotomous structure is linked through bolts, so that the transport, disassembly, assembly, and debugging are simpler and more convenient.
机译:公开了一种大直径单晶炉的尖端电磁场装置。该装置包括用于产生尖头电磁场的直流线圈(2、6)和至少两个装有冷却油的环形封闭容器。两个环形封闭容器上下叠置以形成空心圆柱形状。每个封闭的容器是通过将位于容器外部的半封闭护罩(1、7)与内部圆柱体(12)和位于容器内部的两个挡板(11)彼此焊接而形成的。管线,机油泵和机油冷却器(13)共同构成了强制机油冷却系统。通过封闭的实心铜管形成的一组直流线圈(2、6)布置在每个密闭容器中。由于上部线圈和下部线圈平行排列,产生的磁力线以轴对称的方式分布,因此磁场强度是连续可调的,确保了晶棒的轴向和径向的均匀性,并且控制晶振的效果单晶的氧含量是理想的。在使用中,二分式结构通过螺栓连接,因此运输,拆卸,组装和调试更加简单方便。

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