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Fabrication of graphene electronic devices using step surface contour
Fabrication of graphene electronic devices using step surface contour
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机译:使用台阶表面轮廓制造石墨烯电子器件
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摘要
A method for fabricating an electronic component (100), comprising:- providing a substrate (1);and- depositing a graphene layer (5); wherein- the substrate (1) is either provided with a van-der-Waals functional layer (2) or a van-der-Waals functional layer (2) is deposited on the substrate before depositing the graphene layer;- a surface step contour (3) is formed; and- growth of the graphene layer (5) is seeded at the step contour (3).
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