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TEMPERATURE CONTROLLER CAPABLE OF CIRCULARLY PROVIDING TEMPERATURE FLUID WHICH IS ADJUSTED WITH PREDETERMINED TEMPERATURE, A FLUID CIRCULATION SYSTEM, AND A TEMPERATURE CONTROL METHOD USING THE TEMPERATURE CONTROLLER
TEMPERATURE CONTROLLER CAPABLE OF CIRCULARLY PROVIDING TEMPERATURE FLUID WHICH IS ADJUSTED WITH PREDETERMINED TEMPERATURE, A FLUID CIRCULATION SYSTEM, AND A TEMPERATURE CONTROL METHOD USING THE TEMPERATURE CONTROLLER
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机译:可循环提供预定温度的温度控制器的温度控制器,流体循环系统和使用该温度控制器的温度控制方法
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摘要
PURPOSE: A temperature controller, a fluid circulation system, and a temperature control method using the temperature controller are provided to reduce manufacturing cost by installing only one flow control valve.;CONSTITUTION: A transfer path transfers temperature fluid from a first circulator(2) to a second circulator(3). An outflow path(5) leaks the temperature fluid from the second circulator to the second circulator and returns. A control device(60) comprises a valve controller(62) and a lamp controller(64). A vacuum chamber(C) comprises a susceptor which loads a semiconductor wafer. A supply pump(30) supplies the temperature fluid to the vacuum chamber. A flux control valve(40) which controls the transfer flux of the temperature fluid from the first circulator is installed in the transfer path.;COPYRIGHT KIPO 2012
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