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BASE PLATE INSPECTING DEVICE AND AN INSPECTING DEVICE USING THE SAME CAPABLE OF REDUCING THE MEASURING TIME BY TRANSFERRING A LATTICE ELEMENT IN A TIME ZONE IN WHICH THE PHOTO IS NOT TAKEN
BASE PLATE INSPECTING DEVICE AND AN INSPECTING DEVICE USING THE SAME CAPABLE OF REDUCING THE MEASURING TIME BY TRANSFERRING A LATTICE ELEMENT IN A TIME ZONE IN WHICH THE PHOTO IS NOT TAKEN
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机译:在未拍摄照片的时区中通过转移格子元素来减少测量时间的能力的基础板检查设备和检查设备
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摘要
PURPOSE: A base plate inspecting device and an inspecting device using the same are provided to reduce the measuring time by transferring a lattice element in the frame section in which the corresponding projected surface does not radiate.;CONSTITUTION: A base plate inspecting method including an inspecting device comprises the following steps. A camera is successively opened from a first line(210) to an end line(220). The lattice pattern illumination is radiated on a base plate through the projected surfaces. One or more the lattice element included in the other projected surface except the projected surface radiating the lattice pattern illumination is transferred between the point of time when the end of line is opened and the point of time when the end of line is closed.;COPYRIGHT KIPO 2012
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