首页> 外国专利> BASE PLATE INSPECTING DEVICE AND AN INSPECTING DEVICE USING THE SAME CAPABLE OF REDUCING THE MEASURING TIME BY TRANSFERRING A LATTICE ELEMENT IN A TIME ZONE IN WHICH THE PHOTO IS NOT TAKEN

BASE PLATE INSPECTING DEVICE AND AN INSPECTING DEVICE USING THE SAME CAPABLE OF REDUCING THE MEASURING TIME BY TRANSFERRING A LATTICE ELEMENT IN A TIME ZONE IN WHICH THE PHOTO IS NOT TAKEN

机译:在未拍摄照片的时区中通过转移格子元素来减少测量时间的能力的基础板检查设备和检查设备

摘要

PURPOSE: A base plate inspecting device and an inspecting device using the same are provided to reduce the measuring time by transferring a lattice element in the frame section in which the corresponding projected surface does not radiate.;CONSTITUTION: A base plate inspecting method including an inspecting device comprises the following steps. A camera is successively opened from a first line(210) to an end line(220). The lattice pattern illumination is radiated on a base plate through the projected surfaces. One or more the lattice element included in the other projected surface except the projected surface radiating the lattice pattern illumination is transferred between the point of time when the end of line is opened and the point of time when the end of line is closed.;COPYRIGHT KIPO 2012
机译:目的:提供一种基板检查装置和使用该基板检查装置的检查装置,以通过将格状元件转移到相应的投影表面不辐射的框架部分中来减少测量时间。组成:一种基板检查方法,包括检查装置包括以下步骤。相机从第一线(210)到端线(220)连续打开。格子状照明通过投影面照射到基板上。在行尾结束的时间点和行尾结束的时间点之间转移除辐射点阵图案照明的投影面以外的另一个投影面中包含的一个或多个点阵元素。 2012年韩国知识产权局

著录项

  • 公开/公告号KR20110128462A

    专利类型

  • 公开/公告日2011-11-30

    原文格式PDF

  • 申请/专利权人 KOH YOUNG TECHNOLOGY INC.;

    申请/专利号KR20100047920

  • 发明设计人 KIM HO;

    申请日2010-05-24

  • 分类号G01B11/25;G01N21/956;G01B11/30;H01L21/66;

  • 国家 KR

  • 入库时间 2022-08-21 17:11:35

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