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APPARATUS FOR DETACHING A SUBSTRATE IN A LASER LIFT-OFF PROCESS CAPABLE OF REMARKABLY REDUCING THE FAILURE RATE OF AN LED ELEMENT
APPARATUS FOR DETACHING A SUBSTRATE IN A LASER LIFT-OFF PROCESS CAPABLE OF REMARKABLY REDUCING THE FAILURE RATE OF AN LED ELEMENT
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机译:用于在激光升降过程中分离基质的设备,该过程可显着降低LED元件的故障率
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摘要
PURPOSE: An apparatus for detaching a substrate in a laser lift-off process is provided to increase the packaging density of a substrate by simultaneously preventing the characteristic of an LED element from being dropped and keeping the advantage of a vertical electrode structure.;CONSTITUTION: A buffer layer(20) is formed at the upper part of a sapphire substrate(10). A gallium nitride-based LED structure(30) is laminated on the surface of the buffer layer. The gallium nitride-based LED structure comprises a N-type nitride gallium film(31), an active layer(32), a P-type nitride gallium film(33), a P-type electrode layer(34), and a reflecting layer(35). A plurality of structural support layers(40) is laminated on the top surface of the LED structure. A vacuum chuck(110) respectively adsorbs the substrate and the structural support layer onto the top part and lower part.;COPYRIGHT KIPO 2012
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