CHUCK TABLE APPARATUS USED IN LASER PROCESSING APPARATUS, LASER PROCESSING APPARATUS ADOPTING THE SAME, AND CHUCKING METHOD THEREOF

摘要

PURPOSE: A laser processing device, a chuck table device of the laser processing device, and a chucking method are provided to remove a need for a separate fixed jig depending on a target since the target is fixed by vacuum pressure and magnetic force even if the size and outer shape of the target change. CONSTITUTION: A chuck table device of a laser processing device comprises a table(110), an absorbing bed(120), a lattice bed(130), a first magnet, and a second magnet. The absorption bed is arranged on the table. The absorption bed comprises a plurality of vacuum absorption parts(140). The lattice bed comprises a plurality of lattices supporting targets. The vacuum absorption parts are located in a plurality of lattices. The first magnet is arranged in the lattices. The target is located between the first and second magnets. The first magnet is detachably arranged in the lattices.