LEAKING DETECTING DEVICE AND METHOD WHICH IS USED FOR DETECTING THE MINUTE LEAKAGE OF A TESTER USING HELIUM

摘要

PURPOSE: A leakage detecting device and method are provided to offer a result in which degree of precision is high by executing determination through helium detection by multi-phase.;CONSTITUTION: A chamber separates a tester into an internal space and an outer space. A first vacuum part(400) senses degree of vacuum of the internal space of the tester. A second vacuum part(500) senses degree of vacuum of the outer space of the tester. A helium supply part(600) supplies helium to a space having the low degree of vacuum between the first vacuum part and the second vacuum part. A helium detection part(700) detects the helium within a space in which the helium is not supplied. A controller(900) determines leakage according to a detection amount of the helium.;COPYRIGHT KIPO 2012