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Processes for Fabricating Conductive Patterns Using Nanolithography as a Patterning Tool
Processes for Fabricating Conductive Patterns Using Nanolithography as a Patterning Tool
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机译:使用纳米光刻作为图案化工具制造导电图案的工艺
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摘要
Nanolithographic deposition of metallic nanostructures using coated tips for use in microelectronics, catalysis, and diagnostics. AFM tips can be coated with metallic precursors and the precursors patterned on substrates. The patterned precursors can be converted to the metallic state with application of heat. High resolution and excellent alignment can be achieved.
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