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METHOD OF CONTROLLING THE MATERIAL PROPERTIES OF ZINC-OXIDE NANOWIRE AND METHOD OF MANUFACTURING TRANSISTOR
METHOD OF CONTROLLING THE MATERIAL PROPERTIES OF ZINC-OXIDE NANOWIRE AND METHOD OF MANUFACTURING TRANSISTOR
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机译:氧化锌纳米线的材料控制方法及晶体管的制造方法
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摘要
PURPOSE: A method for controlling zinc-oxide nanowire physical properties is provided to control electric and optical property. CONSTITUTION: A method for controlling zinc-oxide nanowire physical properties comprises: a step of preparing zinc-oxide nanowire(5) inside a vacuum chamber; a step of irradiating laser to the zinc oxide nanowire; a step of melting the zinc-oxide nanowire; and a step of cooling zinc-oxide nanowire. The lase is selected from 'ArF, KrF, XeCl, XeF, KrCl, F_2, Kr_2, Xe_2, XeBr, CaF_2, Cl_2 and N_2. The laser is irradiated in pluse form. The pulse duration is 2 femto seconds to 500 nano seconds.
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