Correcting Device to Compensate for Polarization Distribution Perturbations and Projection Objective for Microlithographic Projection Lens

摘要

calibration device to compensate for the disturbance in the cross-section of the beam polarization distribution (10) is described. The calibration apparatus has two parallel surfaces (24, 26,126,127), the two elements having a double refractive correction comprising (20, 22; 120a, 120b, 122; 220;; 222 320, 322) and a member (18, 118). The correction element (22,122,222), the thickness (d) of the surface; it is constant between (22, 126, 127). ; One or more correction elements (20, 22; 120a, 120b, 122; 220; 222; 320, 322) at least one surface (24, 26; 126, 127) is reprocessed, the thickness d localized and non-uniform is generated, whereby the disturbance of the polarization distribution is to be substantially compensated. Such a device, the thickness (d) and the correction element (20, 22; 120a, 120b, 122; 220; 222; 320, 322) is selected, the characteristics of the double refraction does not OSCAR a localized non-uniform in thickness d If the double-refraction effect is to be canceled each other. Correction apparatus of the present invention will only affect the polarization compensation point in the way.