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Gadolinium oxide insulator film containing different Rare earth elements and Preparing method thereof
Gadolinium oxide insulator film containing different Rare earth elements and Preparing method thereof
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机译:含不同稀土元素的氧化oxide绝缘膜及其制备方法
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摘要
This invention relates to gadolinium oxide insulating film and a process for the preparation thereof , are explained more specifically in isolation characteristic by addition to the good oxidation will add a heterologous ( ) a rare earth element in gadolinium- enhanced and the insulating property of the insulating film for a specific emission spectrum , and also relates to a method for producing such an insulating film by using a non- vacuum system of the spin coating method will . Gadolinium oxide insulating film of the present invention can be applied usefully in the insulating film such as the thin-film transistor , the manufacturing method presented in this invention is applicable to a large display electronic devices by using a spin coating method, a non- vacuum deposition method . ; 展开▼