SPP Bragg Grating Components in the MIM Structure and Manufacturing Method Thereof

摘要

The present invention relates to a device and a manufacturing method SPP Bragg grating in the MIM structure , the first metal layer , and a second metal layer formed on the dielectric layer and the dielectric layer formed on the first metal layer , but provides a Bragg grating device and a method of manufacturing the same , characterized in that the metal Bragg grating structure on the top or bottom of the second metal layer that is formed projecting by miniaturization , low power consumption screen , allowing the implementation of high-density nano- plasmonic circuits and optical integrated module of the cost .