POROUS MATERIALS AND METHOD AND SYSTEM FOR CHARACTERIZING POROUS MATERIALS

摘要

The present invention provides a method and system for diagnosing the effectiveness of a treatment on a porous material. For example, the porous material may comprise a material of porous low dielectric constant. In particular, the method can use FTIR spectroscopy to characterize the porosity of a material and to evaluate the sealing effectiveness of pores in the material.;Porous material, dielectric constant, sealing process, sealing layer, pore