The manufacturing method and Indium Tin OxideITO transparent conductive films deposited on the diffusion barrier layer coated Soda lime glass substrate.

摘要

The invention PDP, LCD, OLED, FED, and the diffusion barrier layer is used as the transparent electrode of the E-paper The coated soda relates to a method for producing the transparent conductive film of indium tin oxide over lime substrate, more particularly of expensive alkali-free glass plate used in the display, and thermal expansion on the cheap soda lime glass substrate as a replacement for glass waejeom coefficients are similar to alumina substrate (Al ₂ O ₃ ) the alkali ion diffusion barrier layer is deposited on a surface enhancement due to the coefficient of thermal expansion matching glass substrate and ITO thin film roughness the layer at a low temperature in the upper film is formed of indium tin oxide and that of the amorphous form at 400 2 nitrogen (N ₂ ) or 3% of hydrogen to the heat treatment in an argon atmosphere containing a polycrystalline nitride that the method characterized by, permeability, conductivity, and surface roughness and the like can be produced very economically superior ITO transparent conductive film on a cheap glass substrate.