ITO TARGET FOR A COATED GLASS OF TOUCH PANEL FOR MANUFACTURING ITO ELECTRODE HAVING IMPROVED DURABILITY

摘要

PURPOSE: An ITO target for a coated glass of touch panel for manufacturing ITO electrode having improved durability is provided to reduce a deposition rate, blackening, arching speed and breaking of ITO target by improving the density of the ITO target.;CONSTITUTION: An ITO target for a coated glass of touch panel for manufacturing ITO electrode having improved durability comprises additive of tinoxide(SnO 2), indium tin oxide(In 2O 3), titanium(Ti) and zinc(Zn). The additive has a weight ratio of 0.05~0.1wt%. The tinoxide(SnO 2) has a weight ratio of 2wt%. The indium tin oxide(In 2O 3) has a weight ratio of 97.95~97.90wt%. An ITO(Indium Tin Oxide) electrode(104) has thickness of 10~20nm. A SiO 2 layer(102) and ITO electrode are successively formed on a substrate(100). The coated mirror is formed on the SiO 2 layer.;COPYRIGHT KIPO 2012