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ADVANCED PROCESS CONTROL SYSTEM AND METHOD UTILIZING VIRTUAL METROLOGY WITH RELIANCE INDEX
ADVANCED PROCESS CONTROL SYSTEM AND METHOD UTILIZING VIRTUAL METROLOGY WITH RELIANCE INDEX
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机译:利用虚拟指数和可靠性指标的先进过程控制系统和方法
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摘要
PURPOSE: An advanced process control system and a method utilizing virtual metrology with a reliance index are provided to overcome problems of manage management delay and the dependence of the VM feedback loop of an R2R control. CONSTITUTION: A processing tool(100) processes a plurality of history workpieces. The processing tool performs a plurality of process runs. An instrumentation tool(110) measures a plurality of sampling workpieces. The instrumentation tool measures a plurality of real measurement values of history measurement data and sampling work pieces. A virtual measurement module supplies a plurality of virtual measurement values of the process runs. A dependence index module generates the dependence index(RI) of the process runs.
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