3D MEASUREMENT APPARATUS USING DUAL WAVE DIGITAL HOLOGRAPHY

摘要

PURPOSE: A 3D measuring system using dual-wave digital holography is provided to achieve hologram even using light beam of spherical waveform as reference beam. CONSTITUTION: A 3D measuring system using dual-wave digital holography comprises a light source(10), a beam splitting and interference part(20), a reference beam generating part(30), a photographing part(40), and a controller(50). The light source irradiates first and second lights having different wavelengths and polarization states. The beam splitting and interference part receives first and second measurement lights. The reference beam generating part is arranged on a reference light path. The photographing part takes images of the first measurement light, a first interference light, the second measurement light, and a second interference light. The controller extracts respective hologram images from the first and second interference lights and measures the surface shape of an object(100).