TRIMMING METHOD FOR TRIMMING A PROCESSING LAYER OF A DOUBLE-SIDED POLISHING APPARATUS CAPABLE OF SIMULTANEOUSLY PROCESSING BOTH SURFACES OF A FLAT STRUCTURE AND A TRIMMING APPARATUS USING THE SAME

摘要

PURPOSE: A trimming method for trimming a processing layer of a double-sided polishing apparatus and a trimming apparatus using the same are provided to trim two processing layers applied on mutually facing surfaces of a lower processing disc and an upper processing disc.;CONSTITUTION: A tooth-shape part(10) comprises a trimming main body(8) on a trimming disc(9). The trimming disc is installed on the circumference of the trimming disc. The trimming main body is uniformly arranged on a pitch circle(17) into a concentric shape from the circumference of the trimming disc. The width of a ring is exactly equivalent to the diameter of the trimming main body. The diameter of the trimming main body is smaller than a ring width between an inner envelope curve(18b) and an outer envelope curve(18a).;COPYRIGHT KIPO 2012