FLUORINATED ALCOHOL COMPOUND HAVING EXCELLENT TRANSPARENCY, A FLUORINE-CONTAINING MONOMER, A POLYMER COMPOUND HAVING HIGH RESOLUTION AND EXCELLENT SWELLING RESTRAINING ABILITY, A RESIST MATERIAL, AND A PATTERNING METHOD

摘要

PURPOSE: A fluorinated alcohol compound is provided to have excellent transparency in the wavelength of 500nm or less, especially in the wavelength of 300nm or less, and is very useful as a monomer for manufacturing a base resin of a radiation-sensitive resist with good developing ability.;CONSTITUTION: A fluorinated alcohol compound comprises a structure in chemical formula 1. In chemical formula 1, R^1 is hydrogen, or a C1-20 linear, branched or cyclic monovalent hydrocarbon group, -CH2- consisting of the monovalent hydrocarbon group is able to be substituted by -O- or -C(=O)-, and Aa is a C1-20 linear, branched or cyclic (k^1+1)-valent hydrocarbon group(k^1 is the integer of 1-3).;COPYRIGHT KIPO 2012