BONDING COMPOSITION COMPOSED OF TWO ORE MORE INEXPENSIVE METALS FOR A ROTARY SPUTTERING TARGET AND A ROTARY TARGET BONDING METHOD USING THE SAME

摘要

PURPOSE: A bonding composition for a rotary sputtering target and a rotary target bonding method using the same are provided to manufacture a rotary target at low cost by mixing two or more inexpensive metals.;CONSTITUTION: A bonding composition for a rotary sputtering target bonds a cylindrical target(120) to the outer periphery of a cylindrical backing tube(110) of a rotary sputtering target. The bonding composition comprises bismuth of 50-54wt.%, Sn(Stannum) of 46-50wt.%, and In(Indium) or Ag(Silver) of 1-6wt.%.;COPYRIGHT KIPO 2012