MANUFACTURING METHOD AND APPARATUS OF AN ORGANIC SEMICONDUCTOR/POLYMER THIN FILM USING CORONA DISCHARGE TO DESIRABLY CONTROL CRYSTAL GROWTH, AN OTFT MADE BY EMPLOYING THE METHOD, AND A MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A manufacturing method and apparatus of an organic semiconductor/polymer thin film using corona discharge, an OTFT made by employing the method, and a manufacturing method thereof are provided to induce vertical phase separation between an organic semiconductor and a polymer binder when making a thin film and obtain a uniform surface of a thin film.;CONSTITUTION: A manufacturing method and apparatus of an organic semiconductor/polymer thin film using corona discharge comprises a moving stage, a substrate, a tip-shaped corona upper electrode, and a plate-shaped corona lower electrode. The moving stage moves at a uniform speed in a specific direction. The substrate is placed on the moving stage and moved at the same speed and in the same direction as the moving stage. The corona upper electrode is fixed to the moving stage and induces corona discharge by application of voltage. The corona lower electrode is located between the moving stage and the substrate and has an opposite polarity to the tip-shaped corona upper electrode.;COPYRIGHT KIPO 2012