SUBLIMATION PURIFYING APPARATUS AND AN INNER PIPE UNIT FOR THE SUBLIMATION PURIFYING APPARATUS CAPABLE OF PREVENTING THE MIXING OF LIQUID RESULTANT PRODUCTS OBTAINED AT DIFFERENT TEMPERATURES

摘要

PURPOSE: A sublimation purifying apparatus and an inner pipe unit for the sublimation purifying apparatus are provided to reduce the sublimation purifying number of the apparatus by forming stepped parts between a plurality of inner pipes.;CONSTITUTION: A sublimation purifying apparatus includes a plurality of inner pipes(101 to 104) and a plurality of heaters. The inner pipes are connected and contain target materials. The heaters heat the inner pipes with different temperatures. Inner diameters of the inner pipes are reduced such that the inner sides of the inner pipes are in the form of cone. The outer diameters of the inner pipes are constant. Stepped parts are formed between the inner pipes.;COPYRIGHT KIPO 2012