MICRO DISCHARGE DEVICE CAPABLE OF PREVENTING JAM OF A FLOW PATH BY IMPURITIES OR MICRO PARTICLES, AND A MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A micro discharge device is provided to stably support path-forming substrate by vibration transferred by piezoelectric element, and pressure for electrical connection of a piezoelectric element.;CONSTITUTION: A micro discharge device comprises an upper substrate(10), a lower substrate(20), a piezoelectric actuator(30), and at least one support(22). On the upper substrate, an inlet(11) for flowing fluid, and a groove portion for forming chamber are formed. The lower plate comprises a groove part for forming reservoir(21), and provides a reservoir for fluid storage. The piezoelectric actuator is formed on top of the upper substrate, and provides driving force for discharging to the chamber. The support is projected from lower plane of the groove part for forming reservoir, and supports the upper substrate. The micro discharge device additionally comprises a filter part. The filter part prevents the jam of flow path in the side of the groove part.;COPYRIGHT KIPO 2012