MANUFACTURING PROCESS OF AN ACOUSTIC WAVE RESONATOR INCLUDING A SUSPENDED MEMBRANE FOR MANUFACTURING A BULK ACOUSTIC WAVE RESONATOR INCLUDING A SLENDER LAYER OF A PIEZOELECTRIC MATERIAL

摘要

PURPOSE: A manufacturing process of an acoustic wave resonator including a suspended membrane is provided to deposit contaminants degassing from the top of a surface of a bonding section with an AFM(Atomic Force Microscope) tip.;CONSTITUTION: A first stack including one ore more first piezoelectric material layers is generated on the top of the surface of a first substrate. A second stack including one or more second substrates is generated. One or more non-bonding initiating zones are formed by depositing or forming controlled sized particles of nano structures which are projected from one surface of either the first stack or the second stack. The first stack and the second stack are directly bonded. Bubble is formed between the first stack and the second stack due to the presence of the non-bonding initiating zones. The first stack is thinned in order to eliminate the first substrate.;COPYRIGHT KIPO 2012