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METHOD FOR FABRICATING ZNO NANOWIRE USING METAL MASKING AND THE ZNO NANOWIRE MEMBER FABRICATED FROM THE SAME
METHOD FOR FABRICATING ZNO NANOWIRE USING METAL MASKING AND THE ZNO NANOWIRE MEMBER FABRICATED FROM THE SAME
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机译:使用金属掩膜制造Zno纳米线的方法以及由其制造的Zno纳米线成员
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摘要
PURPOSE: A manufacturing method of zinc oxide nano-wires using metal masking and a zinc oxide nano-wire material manufactured by the method are provided to control density of growing zinc oxide nano-wires by forming metallic mask layer on a catalyst layer without a light exposure process. CONSTITUTION: A manufacturing method of zinc oxide nano-wires using metal masking comprises the following steps: preparing a substrate(10); forming a catalyst layer(20) of zinc oxide material on the substrate; forming a mask layer(30) having a plurality of growth holes(33) through a thermal process; and growing zinc oxide nano-wires(40) based on the catalyst layer part which is exposed to the plurality of growth holes. The metallic mask layer formation step comprises the following steps: forming a coating layer with 20-30 nano meters thickness by spreading aqueous solution including the metal nano-particles on the catalyst layer; and forming the metallic mask layer by heat treating the coating layer at 150-700 deg. Celsius.
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