MANUFACTURING METHOD OF A 4-POINT PROBE HOLDER USING SINGLE CRYSTAL AND A 4-POINT PROBE HOLDER MANUFACTURED BY THE SAME TO IMPROVE THE PRECISION OF SPECIMEN ANALYSIS

摘要

PURPOSE: A manufacturing method of a 4-point probe holder using single crystal and a 4-point probe holder manufactured by the same are provided to analyze the characteristics of various materials by extending the range of specimens for specific resistance measurement.;CONSTITUTION: Single crystal(10), which has grown up from single crystal seed, is cut into a circular plate(20) by a wire-cut(30). Metal parts of a 4-point probe holder(100), including an electrode(211), a probe(212), a fixing pin(213), and a wiring line(214), is formed into single crystal parts by processing the circular plate. The single crystal parts are polished and finished. The finished single crystal parts are arranged and fixed in 4-point parts of a substrate.;COPYRIGHT KIPO 2012