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MASK WITH TRANSPARENT PARTITION WALLS AND A LIGHT EXPOSING APPARATUS INCLUDING THE SAME CAPABLE OF SIMULTANEOUSLY ORIENTING TWO REGIONS WITH DIFFERENT ORIENTING DIRECTIONS
MASK WITH TRANSPARENT PARTITION WALLS AND A LIGHT EXPOSING APPARATUS INCLUDING THE SAME CAPABLE OF SIMULTANEOUSLY ORIENTING TWO REGIONS WITH DIFFERENT ORIENTING DIRECTIONS
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机译:具有透明分隔墙的遮罩和一种曝光设备,包括可同时定向两个方向不同的区域的设备
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摘要
PURPOSE: A mask with transparent partition walls is provided to simplify operational processes by reducing the number of light exposure and reducing power required for using light source.;CONSTITUTION: A transparent mask includes a plurality of transparent partition walls(30, 40). The transparent partition walls of constant intervals are parallelly formed. The transparent partition walls are capable of changing the vibration direction of incident polarized light from S polarized light to P polarized light or from P polarized light to S polarized light. The transparent partition walls are formed to halve the angle of the progress direction of two incident polarized light with different vibration directions.;COPYRIGHT KIPO 2012
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