MANUFACTURING METHOD OF CERAMICS TEMPLATE HAVING MICRO-PATTERN CAPABLE OF GRAFTING MAGNETISM ASSEMBLING PROPERTY AND NANO-IMPRINT TECHNOLOGY

摘要

PURPOSE: A manufacturing method of ceramics template having micro-pattern is provided to improve accuracy and density of the micro-pattern by eliminating defects due to disorder orientation.;CONSTITUTION: A manufacturing method of ceramics template having micro-pattern comprises the following steps: manufacturing compliant mold which includes a protruded unit; forming a coating layer by spreading metal-organic precursor solution on a substrate(31); solidifying the coating layer as pressurizing the coating layer with the compliant mold; forming a metal oxide pattern(33) in which a first concave part is included by eliminating the compliant mold; filling a block copolymer coating layer which includes block copolymer in the first concave part(34); separating recurring units by sintering the block copolymer coating layer; forming a magnetism assembling structure which is composed of a plurality of high-molecule-blocks; and forming micro-patterns(43) which includes a second concave part by eliminating a part of the copolymer.;COPYRIGHT KIPO 2012