METHOD FOR MANUFACTURING AN ORGANIC EL DEVICE CAPABLE OF CONTROLLING POSITIONAL DEVIATION CAUSED BY THE DIFFERENCE OF LINEAR EXPANSION COEFFICIENTS AND AN APPARATUS THEREOF

摘要

PURPOSE: A method for manufacturing an organic EL(Organic Electroluminescent) device and an apparatus thereof are provided to efficiently manufacture the organic EL device by controlling positional deviation between a traveling direction of each layer formed on a base material and a vertical direction of the traveling direction.;CONSTITUTION: A base material supply device(5a) supplies a strip-shaped material(21) to a can roll(7). A shadow mask supply device(6a) supplies a strip-shaped shadow mask(31) to the can roll. A first through hole respectively inserted into an alignment pin(11) is formed on both end parts of a width direction of the base material. A second through hole is formed on both end parts of the width direction of the shadow mask. A deposition source(9) is arranged in a location facing a support region for the base material.;COPYRIGHT KIPO 2012