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ORGANIC DRY JET PRINTING DEVICE AND METHOD FOR MANUFACTURING THE HIGHLY EFFICIENT ORGANIC THIN FILM TRANSISTORS, AND THE HIGHLY EFFICIENT ORGANIC THIN FILM TRANSISTORS MANUFACTURED BY THE SAME DEVICE AND METHOD
ORGANIC DRY JET PRINTING DEVICE AND METHOD FOR MANUFACTURING THE HIGHLY EFFICIENT ORGANIC THIN FILM TRANSISTORS, AND THE HIGHLY EFFICIENT ORGANIC THIN FILM TRANSISTORS MANUFACTURED BY THE SAME DEVICE AND METHOD
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机译:用于制造高效有机薄膜晶体管的有机干喷印装置和方法,以及由该装置和方法制造的高效有机薄膜晶体管
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摘要
PURPOSE: An organic vapor phase jet printing device for manufacturing a high performance organic thin film transistor, a manufacturing method of the high performance organic thin film transistor, and the high performance organic thin film transistor manufactured using the same are provided to greatly improve power efficiency while minimizing constant resistance and an injection energy barrier. CONSTITUTION: A first storage chamber(210) and a second storage chamber(230) store an organic semiconductor material and a dopant material. A mixing chamber(200) selectively stores an organic semiconductor material and a dopant material of a vapor phase. A nozzle(205) is included in the end of the mixing chamber to spray a stored organic material in a jet state. Passages(215,235) for carrying an organic material are formed between a first storage chamber and a second storage chamber and the mixing chamber. A plurality of on and off valves(300) individually controls the flow of carrier gas for carrying each organic material.
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