MANUFACTURING METHOD OF A THIN FILM HAVING SUPERHYDROPHOBIC SURFACE CAPABLE OF FORMING NONOSTRUCTURES HAVING VARIOUS DINSITIES BY REACTIVE ION ETCHING

摘要

PURPOSE: A manufacturing method of a thin film having superhydrophobic surface is provided to easily manufacture nanostructures by reactive ion etching using nanoparticles as a mask.;CONSTITUTION: A manufacturing method of a thin film having superhydrophobic surface comprises the following steps: hardening a polymer thin film by exposing the thin film to ultraviolet ray after forming a uniform polymer thin film; modifying the surface after processing the polymer thin film with oxygen plasma; fixing gold nanoparticles on the polymer thin film surface by dipping the surface modified polymer thin film into a gold nanoparticle solution; and removing the gold nanoparticles existed on the surface and washing with distilled water after performing the reactive ion etching.;COPYRIGHT KIPO 2012