ENERGY CONSERVATION TYPE SILENCER ASSEMBLY AND VACUUM PUMP WITH THE SAME FOR MANUFACTURING OF SEMICONDUCTOR AND HEAT METHOD OF NITROGEN GAS

摘要

PURPOSE: An energy conservation type silencer assembly and vacuum pump with the same for manufacturing of semiconductor and heat method of nitrogen gas are provided to solve blockage issues due to a solidification of by-products with a preliminary heat tube. CONSTITUTION: A silencer(110) is connected to a discharge side of a pumping unit. A heat space is made between an external tube(120) and the silencer. A nitrogen provider supplies nitrogen gas into the heat space. A nitrogen gas dispenser(150) is contacted to the outer surface of the silencer in the heat space. The nitrogen gas dispenser sprays heated nitrogen gas inside the silencer.