ENERGY CONSERVATION TYPE SILENCER ASSEMBLY AND VACUUM PUMP WITH THE SAME FOR MANUFACTURING OF SEMICONDUCTOR AND HEAT METHOD OF NITROGEN GAS

摘要

The present invention relates to an energy-saving silencer assembly, a vacuum pump for semiconductor manufacturing and a method for heating nitrogen gas having the same, and heating nitrogen gas using a high temperature of the silencer's own surface and supplying it into the silencer to solidify the reaction by-product. It is possible to reduce the energy cost of using a separate heat source while eliminating the clogging problem. In the case of the energy-saving silencer assembly of the present invention, the silencer which is connected to the discharge side of the pump unit for pumping the reaction byproduct gas in the vacuum pump and passes the pumped reaction byproduct gas from the rear end to the distal end, and surrounds the outer peripheral surface of the silencer Wrap the outer space to provide a heating space between the silencer, nitrogen gas supply unit for supplying nitrogen gas to the heating space, and nitrogen gas injection for injecting heated nitrogen gas into the silencer in contact with the outer peripheral surface of the silencer in the heating space. It is configured to include a wealth.