SYSTEM AND A METHOD FOR EXTRACTING A SAMPLE OF A FLUIDIZED BED REACTOR USING A MONOSILANE, CAPABLE OF CONSECUTIVELY PERFORMING A PARTICLE-SIZE ANALYSIS

摘要

PURPOSE: A system and a method for extracting a sample of a fluidized bed reactor using a monosilane are provided to accurately extract a sample particle without a loss of reacting time in a fluidized bed reactor and efficiently purify a residual monosilane from the extracted sample particle.;CONSTITUTION: A system and a method for extracting a sample of a fluidized bed reactor using a monosilane comprises an extraction pipe(10), a sample container(20), a mixing dispersing container(4), and a particle-size analyzing device(17). The extraction pipe comprises an extraction hole formed in the inner wall side of a reactor and discharges a sample through the extraction hole. The sample container is connected to the extraction pipe through a first three way valve and accommodates the sample according to the opening and closing operation of the first three way valve. The mixing dispersing container accommodates the sample by being connected to the sample container through a sample discharging valve and comprises a steering device and generates a dispersing solution by steering the sample and a dispersion medium. The particle-size analyzing device is connected to the mixing dispersion container, thereby analyzing the particle-size of the dispersion solution.;COPYRIGHT KIPO 2012