MESH-ACCELERATION TYPE PLASMA CLEANING DEVICE TO WHICH A MAGNETIC FIELD IS APPLIED FOR IMPROVING CLEANING UNIFORMITY

摘要

PURPOSE: A mesh-acceleration type plasma cleaning device to which a magnetic field is applied is provided to efficiently clean materials of various shapes.;CONSTITUTION: An anode sheet(140) is located on the top of a chamber flange(180). A mesh electrode(120) is located on the top of the anode sheet. A first support(150) fixes the anode sheet and the mesh electrode. A second support(130) is combined with the anode sheet and supports the mesh electrode. A power supply unit(60) supplies direct current or alternating current power to the anode sheet and the mesh electrode to generate plasma.;COPYRIGHT KIPO 2012