DEVICE FOR ANALYZING X RAYS, CAPABLE OF REDUCING A TIME REQUIRED FOR A MAPPING ANALYSIS

摘要

PURPOSE: A device for analyzing X rays is provided to effectively perform the measurement by designating a section which is not needed to measure in a mapping area.;CONSTITUTION: A device for analyzing X rays comprises a specimen stage(9), a movable unit, a radiant ray source(1), an X-ray detection unit, an analyzing unit, an image obtaining unit, an analysis processing unit(6), an X-ray mapping processing unit(10), a display unit, and an area designating unit. The specimen stage comprises a specimen(8). The movable unit moves the specimen stage. The radiant ray source radiates first radiation to a radiating point. The X-ray detection unit detects X-rays discharged from the specimen, and outputs signals with the information on the energy of the X-rays. The analyzing unit is connected to the X-ray detection unit, and analyzes the signals. The image obtaining unit obtains the image data of the specimen.;COPYRIGHT KIPO 2013