COMPUTER READABLE STORING MEDIUM, A DETERMINING METHOD, AND A COMPUTER CAPABLE OF STORING A PROGRAM FOR DETERMINING THE EXPOSURE CONDITION OF AN EXPOSURE DEVICE

摘要

PURPOSE: A computer readable storing medium, a determining method, and a computer are provided to optimize the exposure condition of an exposure device.;CONSTITUTION: A computer readable storing medium stores a program which allows a computer to determine the exposure condition of an exposure device. The program includes the following: a process for selecting the main evaluating item from a plurality of evaluating items which evaluates images on the image side of a projection optical system; a process for selecting an auxiliary evaluating item of which the value is changed to the same direction of the changed value of the main evaluating item, when parameter values in the exposure condition are changed; a process for setting an evaluating function with the main evaluating item and the auxiliary evaluating item; a process for calculating the value of the evaluating function with respect to each image; and a process for determining a parameter value corresponding to the value of the evaluating function(S120).;COPYRIGHT KIPO 2013;[Reference numerals] (AA) Start; (BB,DD,EE,II) No; (CC,GG,FF,HH) Yes; (JJ) End; (S102) Setting parameter values in an exposure condition; (S104) Selecting major cost; (S106) Selecting auxiliary cost; (S108) Setting optimal cost; (S110) Calculating an optimal cost value; (S112) Is the changed frequency of the parameter values as much as the pre-determined frequency?; (S114) Does the optimal cost value satisfy the target value?; (S116) Does the auxiliary cost change?; (S120) Determining the parameter values; (S122) Setting new optimal cost