FERROELECTRIC POLYMER NANO-DOT DEVICE AND A DEWETTING PROCESS FOR THE MANUFACTURING THEREOF CAPABLE OF PREVENTING DEGRADATION OF DEVICE CHARACTERS DUE TO DEFORMATION OR ADHESION OF NONO-DOTS

摘要

PURPOSE: A ferroelectric polymer nano-dot device and a dewetting process for the manufacturing thereof are provided to have uniform size and density and to be uniformly patterned.;CONSTITUTION: A ferroelectric polymer nano-dot device(200) comprises a substrate(101), a lower electrode(102) and P(VDF-TrFE) nano-dots(201). The substrate is composed of insulating materials. The lower electrode is formed on an upper surface of the substrate. The P(VDF-TrFE) nano-dot is formed on the upper surface of the lower electrode in an anti-glare structure and is composed of P(VDF-TrFE) polymers. The ferroelectric polymer nano-dot device additionally includes an upper electrode(104) on the surface of the nano-dot. A dewetting process for manufacturing ferroelectric Polymer nano-dot device comprises the following steps: preparing a substrate; forming a lower electrode on the upper surface of the substrate; obtaining a P (VDF-TrFE) polymer solution; spreading the upper surface of the lower electrode with the P (VDF-TrFE) polymer solution; and obtaining the P (VDF-TrFE) nano-dot through an annealing process.;COPYRIGHT KIPO 2013